Anisotropic etching of three-dimensional shapes in silicon
Files
Publication date
2004
Authors
Kretschmer, H. -R.
Xia, X.
Kelly, J.J.
Steckenborn, A.
Editors
Advisors
Supervisors
Document Type
Article
Metadata
Show full item recordCollections
License
Abstract
Keywords
Citation
Kretschmer, H -R, Xia, X, Kelly, J J & Steckenborn, A 2004, 'Anisotropic etching of three-dimensional shapes in silicon', Journal of the Electrochemical Society, vol. 151, no. 10, pp. C633-C636. https://doi.org/10.1149/1.1790512