Low yield sputtering of monocrystalline metals

Abstract

Sputtering of monocrystalline metals by light noble gas ions is studied experimentally and theoretically at low primary ion energy. Evidence is found for a multiple collision process in which surface atoms are sputtered by backscattered ions. The introduction of the maximum recoil energy EM in the sputtering yield relation enabled us to describe sputtering when small energy transfers are involved.