HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers
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2007
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van Niftrik, A.T.J.
Schermer, J.J.
Bauhuis, G.J.
Mulder, P.
Larsen, P.K.
van Setten, M.J.
Attema, J.J.
Tan, N.C.G.
Kelly, J. J.
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van Niftrik, A T J, Schermer, J J, Bauhuis, G J, Mulder, P, Larsen, P K, van Setten, M J, Attema, J J, Tan, N C G & Kelly, J J 2007, 'HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers', Journal of the Electrochemical Society, vol. 155, pp. D35-D39.