Protocrystalline Silicon at High Rate from Undiluted Silane
Publication date
2004
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Schropp, R.E.I.
van Veen, M.K.
van der Werf, C.H.M.
Williamson, D.L.
Mahan, A.H.
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Schropp, R E I, van Veen, M K, van der Werf, C H M, Williamson, D L & Mahan, A H 2004, 'Protocrystalline Silicon at High Rate from Undiluted Silane', Materials Research Society symposia proceedings, vol. 808, no. 204, pp. A8.4.1.