C-AFM and X-TEM: studies of mixed-phase silicon thin films : correlative microscopy
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Publication date
2008
Authors
Mates, T.
Fejfar, A.
Rezek, B.
Kocka, J.
Bronsveld, P.C.P.
Rath, J.K.
Schropp, R. E.I.
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Abstract
Thin intrinsic silicon films containing microcrystalline grains embedded in amorphous tissue were studied by two complementary microscopy techniques. The conductive atomic force microscopy was performed in standard ambient conditions with very sensitive (pA) current detection. The cross-sectional transmission electron microscopy images of the amorphous phase revealed the columnar structure, which was attributed to the bumpy structures on the surface.
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Mates, T, Fejfar, A, Rezek, B, Kocka, J, Bronsveld, P C P, Rath, J K & Schropp, R E I 2008, 'C-AFM and X-TEM: studies of mixed-phase silicon thin films : correlative microscopy', G.I.T. Imaging & Microscopy, vol. 10, no. 1, pp. 30-32.