Improvements in ANIS and inverted sputter sources

Abstract

In this article two sputter sources, i.e. an ANIS and an inverted sputter source are described. The ANIS has been changed into a SNICS-like configuration and measurements of the output current for different sputter target geometries are presented. In the inverted sputter source an immersion lens was placed between the ionizer and the sputter target. This source is provided with a modified revolving target head with eight targets.