Etching AlAs with HF for epitaxial lift-off applications
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2004
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Voncken, M.M.A.J.
Schermer, J.J.
van Niftrik, A.T.J.
Bauhuis, G.J.
Mulder, P.
Larsen, P.K.
Peters, T.P.J.
de Bruin, B.
Klaassen, A.
Kelly, J.J.
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Voncken, M M A J, Schermer, J J, van Niftrik, A T J, Bauhuis, G J, Mulder, P, Larsen, P K, Peters, T P J, de Bruin, B, Klaassen, A & Kelly, J J 2004, 'Etching AlAs with HF for epitaxial lift-off applications', Journal of the Electrochemical Society, vol. 151, no. 5, pp. G347-G352. https://doi.org/10.1149/1.1690293