Electronic sputtering of silicon suboxide films by swift heavy ions
Publication date
2005
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Arnoldbik, W.M.
Zeijlmans Van Emmichoven, P.A.
Habraken, F.H.P.M.
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Arnoldbik, W M, Zeijlmans van Emmichoven, P A & Habraken, F H P M 2005, 'Electronic sputtering of silicon suboxide films by swift heavy ions', Physical Review Letters, vol. 94, 245504, pp. 1-4.